Ferendeci, A. M.2017-06-092017-06-091973Ferendeci, A. M. (1973). Rotating and rectilinear probe motion within a cone angle of 34° . İstanbul : T. A. E. C. Çekmece Nuclear Research And Training Center.http://kurumsalarsiv.tenmak.gov.tr/handle/20.500.12878/452TENMAK D.N.. 10339A probe holder is described which can transmit tilting and rectilinear motion to a vacuum system from the outside with added vacuum safety while moving the probe. It consists of a spherical part which can rotate within a two-section housing. Rectilinear motion is obtained with a piston ring seal through this sphere. Thus the probe is movable within a cone angle of 34°. The probe holder can be used with vacuum systems for plasma research as well as with coating units for various possible applications and it can be machined easily with a latheenginfo:eu-repo/semantics/openAccessMathematical physicsMatematiksel fizikreport